□ Dimension
1,650 x 1,705 x 1,910(mm)
□ Load Port
FOUP
FOSB
Open CST
□ Function
OCR Reader
Bump Test
Pre-Aligner
Fan Filter Unit
□ Dimension
1,650 x 1,705 x 1,910(mm)
□ Load Port
FOUP
FOSB
Open CST
□ Function
OCR Reader
Bump Test
Pre-Aligner
Fan Filter Unit